( Lab-3)

Product Specification/Description:  

• Temperature range Min. to Max. for Thermal Chuck: -40 ^oC to 300 ^oC
• Low Noise Probe with Leakage ≤ 5fA for the Application of DC CV, IV, Quasi CV, Very low frequency CV, C-t, I-t  Pulsed Measurement etc.
• Gold Plated Chuck with Diameter ≥ 150 mm
• DC Channels Triaxial SMU sourcing and measuring range for Voltage:Voltage Source ±5 µV to ± 200 V,  Voltage Measures is ± 0.2 µVor low to ± 200 V or high, for Current: Current  Source  ± 2 fA to ± 1A,  Current Measure  ±100 aA to ± 1A.
• High Voltage source meter: Max voltage ≥ 3KV. source or sink up to 3000V @  ≥ 4mA or 1500V @  ≥  8mA, Voltage resolution is  ≤ 200 uV, Current resolution  ≤ 10 fA
• High current source meter Current: >= 20 A (DC) and >= 20 A (Pulse), Max. Voltage > 40 V, Voltage resolution  ≤ 1 uV, Minimum Current resolution is ≤ 10 pA