( Lab-2)

Product Specification/Description:  

• Semi-automated Double Side Mask Alignment System (up to 150 mm, double side, manual handling) for wafer size up to 150 mm, Bond alignment optional
• 350 W-500 W Light Source
• Lamp 500 W Hg
• Lamp 500 W HgXe for DUV
• Optical Set for Wave Length Range 350 – 450 nm
• Optical Set for Wave Length Range 200 – 240 nm
• Digital Top Side Microscope: Travel range*: X: 36 (14) – 150 mm, Y: -70/7 +30 mm
• Bottom* Side microscope: Travel range*: X: 32 (10) rnm – 100 mm; Y: ± l0 mm
• Mask Holder for 2 x 2″, Mask Holder for 3 x 3″,  Mask Holder for 5 x 5″ Masks with Loading Frame
• Vacuum Contact Wafer Chuck 2″, Chuck 3”, Chuck 5”
• UV Power Meter, 365 nm for OAI 308 Probe & additional UV power meter Probe for 220 nm & 435 nm