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Product Specification/Description:  

• Compact RIE System with 13.56MH2 (RF), 600W
• Water- cooled, Rotary Vane Pump (2401/m), 3 MFCw/ 4-ch Controller, Max. 161/m Air Cooled Chiller, Single 6-Inch Wafer Processing Capability & Fully Auto PC Control
• 6-channel MFC Controller
• Turbo molecular Pump 450 l/s
• Automatic Vacuum Control with Motorized Throttle Valve and l0Torr Capacitance Manometer
• Gas Detectors (SF₆ & CHF₃/ CH₄) with Alarm Interlock