This instrument can be used for extraction of the dielectric properties as well as thickness of the thin film typically of a few nm. The instrument relies on the fact that the reflection at a dielectric interface depends on the polarization of the light while the transmission of light through a transparent layer changes the phase of the incoming wave depending on the refractive index of the material
Instument image
Company
Accurion
Model
EP4
Purpose
This instrument can be used for extraction of the dielectric properties as well thickness of the thin film typically of few nm. The instrument relies on the fact that the reflection at a dielectric interface depends on the polarization of the light while