{"id":1138,"date":"2024-11-06T12:30:31","date_gmt":"2024-11-06T12:30:31","guid":{"rendered":"http:\/\/c4dfed.webshot.in\/?page_id=1138"},"modified":"2024-11-08T06:32:15","modified_gmt":"2024-11-08T06:32:15","slug":"reactive-ion-etching","status":"publish","type":"page","link":"https:\/\/c4dfed.iitmandi.ac.in\/?page_id=1138","title":{"rendered":"Reactive Ion Etching \u00a0"},"content":{"rendered":"\t\t<div data-elementor-type=\"wp-page\" data-elementor-id=\"1138\" class=\"elementor elementor-1138\">\n\t\t\t\t<div class=\"elementor-element elementor-element-ca84e51 e-flex e-con-boxed e-con e-parent\" data-id=\"ca84e51\" data-element_type=\"container\">\n\t\t\t\t\t<div class=\"e-con-inner\">\n\t\t<div class=\"elementor-element elementor-element-bb617d3 e-con-full e-flex e-con e-child\" data-id=\"bb617d3\" data-element_type=\"container\">\n\t\t\t\t<div class=\"elementor-element elementor-element-a198dfa elementor-widget elementor-widget-text-editor\" data-id=\"a198dfa\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<h2 style=\"text-align: center;\"><b><\/b><span style=\"color: #000000;\"><strong>Reactive Ion Etching\u00a0<\/strong><\/span><\/h2><p style=\"text-align: center;\"><span style=\"color: #000000;\"><strong>Manufacturer Name\/Country &#8211; Planar TECH UK Limited (England)\u00a0<\/strong><\/span><\/p><p style=\"text-align: center;\"><span style=\"color: #000000;\"><strong>Model Name- PlanarRIE-6S<\/strong><\/span><\/p>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-9f6d430 elementor-widget elementor-widget-image\" data-id=\"9f6d430\" data-element_type=\"widget\" data-widget_type=\"image.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t<img fetchpriority=\"high\" decoding=\"async\" width=\"800\" height=\"600\" src=\"https:\/\/c4dfed.iitmandi.ac.in\/wp-content\/uploads\/2024\/10\/reactive-ion-etching.jpg\" class=\"attachment-full size-full wp-image-633\" alt=\"\" srcset=\"https:\/\/c4dfed.iitmandi.ac.in\/wp-content\/uploads\/2024\/10\/reactive-ion-etching.jpg 800w, https:\/\/c4dfed.iitmandi.ac.in\/wp-content\/uploads\/2024\/10\/reactive-ion-etching-768x576.jpg 768w, https:\/\/c4dfed.iitmandi.ac.in\/wp-content\/uploads\/2024\/10\/reactive-ion-etching-600x450.jpg 600w\" sizes=\"(max-width: 800px) 100vw, 800px\" \/>\t\t\t\t\t\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-e682c5b elementor-widget elementor-widget-spacer\" data-id=\"e682c5b\" data-element_type=\"widget\" data-widget_type=\"spacer.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t<div class=\"elementor-spacer\">\n\t\t\t<div class=\"elementor-spacer-inner\"><\/div>\n\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t<div class=\"elementor-element elementor-element-ebf1d52 e-con-full e-flex e-con e-child\" data-id=\"ebf1d52\" data-element_type=\"container\">\n\t\t\t\t<div class=\"elementor-element elementor-element-2b97404 elementor-widget elementor-widget-text-editor\" data-id=\"2b97404\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<h4><span style=\"color: #000000;\"><strong>( Lab-4)<\/strong><\/span><\/h4><p><strong><span style=\"color: #000000;\">Product Specification\/Description: \u00a0<\/span><\/strong><\/p><ul><li><span style=\"color: #000000;\">Compact RIE System with 13.56MH2 (RF), 600W<\/span><\/li><li><span style=\"color: #000000;\">Water- cooled, Rotary Vane Pump (2401\/m), 3 MFCw\/ 4-ch Controller, Max. 161\/m Air Cooled Chiller, Single 6-Inch Wafer Processing Capability &amp; Fully Auto PC Control<\/span><\/li><li><span style=\"color: #000000;\">6-channel MFC Controller<\/span><\/li><li><span style=\"color: #000000;\">Turbo molecular Pump 450 l\/s<\/span><\/li><li><span style=\"color: #000000;\">Automatic Vacuum Control with Motorized Throttle Valve and l0Torr Capacitance Manometer<\/span><\/li><li><span style=\"color: #000000;\">Gas Detectors (SF<sub>6<\/sub> &amp; CHF<sub>3<\/sub>\/ CH<sub>4<\/sub>) with Alarm Interlock<\/span><\/li><\/ul>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t","protected":false},"excerpt":{"rendered":"<p>Reactive Ion Etching\u00a0 Manufacturer Name\/Country &#8211; Planar TECH UK Limited (England)\u00a0 Model Name- PlanarRIE-6S ( Lab-4) Product Specification\/Description: \u00a0 Compact RIE System with 13.56MH2 (RF), 600W Water- cooled, Rotary Vane [&hellip;]<\/p>\n","protected":false},"author":1,"featured_media":0,"parent":0,"menu_order":0,"comment_status":"closed","ping_status":"closed","template":"","meta":{"footnotes":""},"class_list":["post-1138","page","type-page","status-publish","hentry"],"_links":{"self":[{"href":"https:\/\/c4dfed.iitmandi.ac.in\/index.php?rest_route=\/wp\/v2\/pages\/1138","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/c4dfed.iitmandi.ac.in\/index.php?rest_route=\/wp\/v2\/pages"}],"about":[{"href":"https:\/\/c4dfed.iitmandi.ac.in\/index.php?rest_route=\/wp\/v2\/types\/page"}],"author":[{"embeddable":true,"href":"https:\/\/c4dfed.iitmandi.ac.in\/index.php?rest_route=\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/c4dfed.iitmandi.ac.in\/index.php?rest_route=%2Fwp%2Fv2%2Fcomments&post=1138"}],"version-history":[{"count":10,"href":"https:\/\/c4dfed.iitmandi.ac.in\/index.php?rest_route=\/wp\/v2\/pages\/1138\/revisions"}],"predecessor-version":[{"id":1298,"href":"https:\/\/c4dfed.iitmandi.ac.in\/index.php?rest_route=\/wp\/v2\/pages\/1138\/revisions\/1298"}],"wp:attachment":[{"href":"https:\/\/c4dfed.iitmandi.ac.in\/index.php?rest_route=%2Fwp%2Fv2%2Fmedia&parent=1138"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}